The most severe problem for the vacuum arc deposition (VAD) technique is the formation of micron-size particles on the films. These particles degrade the films' properties. The present work studied the generation mechanisms and characteristics of the droplets that are produced in the carbon films deposited by vacuum arc technique. To achieve a better control of the generation mechanism of these droplets, the effect of the arc current, arc duration time, cathode spot temperature and distance between cathode and substrate on the size and population of the micro-droplets are studied. / The micro-droplets are in the range of 0.3 $ mu$m to 2 $ mu$m in diameter, and have a graphite structure. The most probable origin for these particles are the cathode. The size and population of these particles are directly proportional to the cathode spot temperature (i.e., to the arc current and/or arc duration time), and inversely proportional to the distance between the cathode and the substrate. The droplet production is mainly due to the heating effect.
| Identifer | oai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:QMM.69702 |
| Date | January 1993 |
| Creators | Kandah, Munther |
| Contributors | Meunier, J. L. (advisor) |
| Publisher | McGill University |
| Source Sets | Library and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada |
| Language | English |
| Detected Language | English |
| Type | Electronic Thesis or Dissertation |
| Format | application/pdf |
| Coverage | Master of Engineering (Department of Chemical Engineering.) |
| Rights | All items in eScholarship@McGill are protected by copyright with all rights reserved unless otherwise indicated. |
| Relation | alephsysno: 001392450, proquestno: AAIMM91800, Theses scanned by UMI/ProQuest. |
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