Typically a top-down approach is used in the fabrication of functional nanodevices beginning with the bulk material and imposing a two or three-dimensional structure on the material through a combination of lithography and etching. Pre-patterning of a substrate, resulting in the selective growth of a material, has potential for forming three-dimensional device structures in ways that can be more efficient and which can avoid process complexity and process induced damage. In this thesis, the low temperature (90°C) aqueous growth of complex, single crystalline zinc oxide (ZnO) three-dimensional devices through pre-patterned micron and nanometer sized molds is presented. This work focuses on the quality of the single crystalline ZnO material, the constrained growth of ZnO through various sizes and shapes of molds, and the fabrication of several device structures including pillars, rings, and photonic crystals. Due to their single crystalline nature and crystallographically smooth sidewalls, photonic devices created using this growth method have the potential to outperform traditionally fabricated structures in a range of optoelectronic applications.
In addition, metal-oxide interfaces are the critical components of many electrical and optical devices, and it is rare to find epitaxial metal-oxide structures. In this work, the first demonstration of low temperature, epitaxial growth of ZnO on single crystalline gold plates is presented. The quality and structure of the ZnO on the gold plates is investigated using scanning electron microscopy, atomic force microscopy, and photoluminescence spectroscopy. The epitaxial growth is confirmed using electron backscatter diffraction and transmission electron microscopy. The metal-oxide interfaces fabricated have the potential to be used in a number of technologically important applications. Possible examples include creating high quality electrical contacts on high bandgap materials and improving light extraction from planar LED structures. / Engineering and Applied Sciences - Applied Physics
| Identifer | oai:union.ndltd.org:harvard.edu/oai:dash.harvard.edu:1/17467362 |
| Date | 17 July 2015 |
| Creators | Pooley, Kathryn Jessica |
| Contributors | Hu, Evelyn |
| Publisher | Harvard University |
| Source Sets | Harvard University |
| Language | English |
| Detected Language | English |
| Type | Thesis or Dissertation, text |
| Format | application/pdf |
| Rights | open |
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