This dissertation investigates vector behavior of aberrations for high numerical aperture optical systems using a solid immersion lens (SIL). In order to analyze the system, this dissertation introduces the illumination system transfer function (ISTF), which is a map in the space of the exit pupil that shows reflection and transmission properties of individual plane waves that are emitted from corresponding points in the exit pupil. A vector analysis using ISTF presents the role of propagating and evanescent energy in the SIL systems, where the boundary between the them is defined by total internal reflection. The behavior of third-order aberrations such as coma and astigmatism, are dramatically affected by polarization in high NA systems. The irradiance distribution exhibits significantly different characteristics, depending on how coma or astigmatism is aligned with the incident linear polarized light. Vector effects including diffraction, polarization, and aberration, are used to analyze tolerances along with a comparison to geometrical optics. Apodization in amplitude and phase of the angular spectrum is generated in high NA focusing systems due to the difference in vector transmission and reflection for each plane wave. The size of the incident gaussian beam is effectively reduced at the exit pupil by the amplitude apodization and causes a spot size increase in image space. The apodization in phase is called gap-induced aberration due to its dependence on the air gap. The gap-induced aberration does not come from lens surface imperfection, and it exhibits multiple orders of spherical aberration and astigmatism. The apodization in amplitude and phase is well characterized by separable supergaussian functions, where each function depends on the refractive index of the SIL n SIL and the air gap height h. The best defocus, based on characteristics of gap-induced aberration, is suggested to be a good compensator only for low nSIL and h. The system performance, as represented by Strehl ratio and spot width, is characterized as a function of nSIL and h before and after defocus. C vector formalism is developed based on the common-mode and different-mode transmission coefficients between p and s polarization. Experiments to confirm the apodization are summarized and compared with simulation.
| Identifer | oai:union.ndltd.org:arizona.edu/oai:arizona.openrepository.com:10150/290467 |
| Date | January 2001 |
| Creators | Jo, Sseunhyeun |
| Contributors | Milster, Thomas D. |
| Publisher | The University of Arizona. |
| Source Sets | University of Arizona |
| Language | en_US |
| Detected Language | English |
| Type | text, Dissertation-Reproduction (electronic) |
| Rights | Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. |
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