A phase-conjugate interferometric method of thin film analysis obtains three independent parameters with which to determine a film's refractive index n, absorption coefficient kappa, and thickness d. Because dimensionless intensity ratios are used, this method is self-calibrating except for light source polarization and incident angle. The use of self-pumped phase-conjugate reflectors makes the interferometer self-aligning and results in infinite spacing of fringes of equal thickness. A single layer thin film sample was analyzed by this technique, and the results compared to those of ellipsometry.
| Identifer | oai:union.ndltd.org:arizona.edu/oai:arizona.openrepository.com:10150/291358 |
| Date | January 1990 |
| Creators | Parshall, Elaine Ruth, 1962- |
| Contributors | Gaskill, J. D. |
| Publisher | The University of Arizona. |
| Source Sets | University of Arizona |
| Language | en_US |
| Detected Language | English |
| Type | text, Thesis-Reproduction (electronic) |
| Rights | Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. |
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