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Novel reduced-size micromachined resonators and filters

With an always-increasing need for higher integration, the wireless industry poses challenges regarding miniaturization and high performance circuitry. In addition, the solutions require compatibility with the rest of the design for integration and manufacturing. The present work depicts the progress toward a novel, high quality, one-pole filter-resonator operating in the 5.6-5.8 GHz range. Quality factors up to 640 are demonstrated on Silicon planar structures with volume of 177 mm³. Further size reduction yielded a volume of 24.5 mm³ and a quality factor of 186.

Identiferoai:union.ndltd.org:arizona.edu/oai:arizona.openrepository.com:10150/292052
Date January 2001
CreatorsTavernier, Christophe Antoine
ContributorsPapapolymerou, John
PublisherThe University of Arizona.
Source SetsUniversity of Arizona
Languageen_US
Detected LanguageEnglish
Typetext, Thesis-Reproduction (electronic)
RightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.

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