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Integrated piezoresistive sensing for feedback control of compliant MEMS /

Thesis (Ph. D.)--Brigham Young University. Dept. of Mechanical Engineering, 2007. / Includes bibliographical references (p. 63-69).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/367905317
Date January 2007
CreatorsMessenger, Robert K .,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeElectronic dissertations.
SourceCLICK HERE for online access

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