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Growth and characterization of ZNO and PZT films for micromachined acoustic wave devices

Thesis (Ph. D.)--Auburn University. / Abstract. Vita. Includes bibliographical references (p. 190-202).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/427548974
Date January 2009
CreatorsYoon, Sang Hoon. Kim, Dong Joo,
PublisherAuburn, Ala.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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