Fung, Kar Man. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2002. / Includes bibliographical references (leaves 110-114). / Abstracts in English and Chinese. / 摘要 --- p.i / ABSTRACT --- p.ii / ACKNOWLEDGMENTS --- p.iii / TABLE OF CONTENTS --- p.iv / LIST OF FIGURES --- p.vi / Chapter 1. --- Introduction --- p.1 / Chapter 1.1 --- Background and Motivation --- p.1 / Chapter 1.2 --- Objective of the project --- p.4 / Chapter 1.3 --- Organization of the thesis --- p.5 / Chapter 2. --- Literature Review --- p.7 / Chapter 2.1 --- Control on Micro-Manipulation --- p.7 / Chapter 2.1.1 --- Visual Feedback Control --- p.8 / Chapter 2.1.2 --- Sensor-Based Feedback Control --- p.9 / Chapter 2.1.3 --- Bilateral Control --- p.9 / Chapter 2.2 --- Force Sensing System on Micro-Manipulation --- p.10 / Chapter 2.3 --- PVDF Sensor --- p.11 / Chapter 2.4 --- Summary of the Literature Review --- p.12 / Chapter 3. --- Micro-Manipulation --- p.14 / Chapter 3.1 --- Introduction of Micro-Manipulation --- p.14 / Chapter 3.2 --- Probe Station --- p.14 / Chapter 3.2.1 --- Micromanipulators --- p.15 / Chapter 3.2.2 --- Microscopes --- p.15 / Chapter 4. --- Piezoelectric Polyvinylidence Fluoride (PVDF) Sensor --- p.16 / Chapter 4.1 --- Charteristic of PVDF Sensor --- p.16 / Chapter 4.1.1 --- Piezoelectric Properties --- p.16 / Chapter 4.1.2 --- Dimensions of the PVDF Sensor --- p.18 / Chapter 4.2 --- Comparison of Piezoelectric Materials --- p.19 / Chapter 5. --- Theoretical Analysis of PVDF Sensor --- p.21 / Chapter 5.1 --- Sensitivity of PVDF Sensor --- p.21 / Chapter 5.2 --- Relationship between the Deflection and the Force of the PVDF --- p.22 / Chapter 5.3 --- Calculation of the Spring Constant K of the PVDF --- p.23 / Chapter 5.4 --- Simulation on the output from the PVDF Sensor --- p.23 / Chapter 6. --- Experimental Analysis of PVDF Sensor --- p.26 / Chapter 6.1 --- Force-Deflection Diagram --- p.26 / Chapter 6.2 --- Frequency Response of the PVDF Sensor --- p.27 / Chapter 7. --- 1-D PVDF-Based Sensing System --- p.30 / Chapter 7.1 --- Original Design of the Sensing System --- p.30 / Chapter 7.1.1 --- Plastic pipe and adapter --- p.31 / Chapter 7.1.2 --- PVDF Sensor --- p.32 / Chapter 7.1.3 --- Probe-tip holder --- p.32 / Chapter 7.2 --- Current Design of the Sensing System --- p.32 / Chapter 7.3 --- Analysis of the Sensing System --- p.34 / Chapter 7.3.1 --- Frequency Response of the Sensing System --- p.34 / Chapter 7.3.2 --- Sensitivity of the Sensing System --- p.41 / Chapter 8. --- Experiments on 1-D PVDF Sensing System --- p.49 / Chapter 8.1 --- Experimental Setup of the 1-D Sensing System --- p.49 / Chapter 8.1.1 --- Programmable Micromanipulator --- p.50 / Chapter 8.1.2 --- Charge Amplifier --- p.51 / Chapter 8.2 --- Calibration of the 1-D Sensing System --- p.53 / Chapter 8.2.1 --- Noise Signal from the system --- p.53 / Chapter 8.2.2 --- Signal from vibration --- p.55 / Chapter 8.3 --- Experimental Results on touching a substrate --- p.60 / Chapter 8.3.1 --- Description --- p.60 / Chapter 8.3.2 --- Results from touching a substrate --- p.62 / Chapter 8.3.3 --- Analysis of the deflection after touched a substrate --- p.67 / Chapter 8.4 --- Experimental Results on touching a micro mirror --- p.68 / Chapter 8.4.1 --- Description --- p.68 / Chapter 8.4.2 --- Results --- p.70 / Chapter 8.5 --- Experimental Results on lifting a mass platform --- p.74 / Chapter 8.5.1 --- Description --- p.74 / Chapter 8.5.2 --- Results --- p.76 / Chapter 9. --- Modification of 1-D Sensing System --- p.79 / Chapter 9.1 --- Design of the system --- p.79 / Chapter 9.2 --- Experimental Setup of the system --- p.80 / Chapter 9.3 --- Experimental Results on lifting a mass platform --- p.81 / Chapter 10. --- 2-D PVDF-Based Sensing System --- p.90 / Chapter 10.1 --- Design of the Sensing System --- p.90 / Chapter 10.2 --- Experimental Setup --- p.91 / Chapter 10.3 --- Calibration of the 2-D Sensing System --- p.92 / Chapter 10.3.1 --- Noise Signal from the system --- p.92 / Chapter 10.4 --- Experiments Results on touching a substrate --- p.94 / Chapter 11. --- Experimental Analysis --- p.97 / Chapter 11.1 --- Data Acquisition --- p.97 / Chapter 11.2 --- Spectrum Analysis of the Experimental Data --- p.101 / Chapter 12. --- Conclusion --- p.103 / Chapter 13. --- Future Work --- p.105 / Chapter 13.1 --- Control of the Sensing System --- p.105 / Chapter 13.2 --- Tele-operation System on force feedback sensing system --- p.107 / Chapter A. --- Appendix --- p.109 / Chapter A. 1 --- Procedures in using probe station --- p.109 / Bibliography --- p.110
| Identifer | oai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_323833 |
| Date | January 2002 |
| Contributors | Fung, Kar Man., Chinese University of Hong Kong Graduate School. Division of Automation and Computer-Aided Engineering. |
| Source Sets | The Chinese University of Hong Kong |
| Language | English, Chinese |
| Detected Language | English |
| Type | Text, bibliography |
| Format | print, ix, 114 leaves : ill. ; 30 cm. |
| Rights | Use of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/) |
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