Etch products dynamics of polyphenylene oxide laminates using a CF���/O���/Ar downstream microwave plasma

Description

Graduation date: 1999

Links & Downloads

1. http://hdl.handle.net/1957/33505

Tags

Plasma etching

Microwave plasmas

Additional Fields

Identifer	oai:union.ndltd.org:ORGSU/oai:ir.library.oregonstate.edu:1957/33505
Date	04 March 1999
Creators	Hsu, Chia-Chang
Contributors	Koretsky, Milo D.
Source Sets	Oregon State University
Language	en_US
Detected Language	English
Type	Thesis/Dissertation