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Process Development for ICP Patterning of Through-wafer Periodic Micro-Pores in Silicon Wafers

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Identiferoai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:ucin1282328382
Date01 November 2010
CreatorsJain, Nikhil
PublisherUniversity of Cincinnati / OhioLINK
Source SetsOhiolink ETDs
LanguageEnglish
Detected LanguageEnglish
Typetext
Sourcehttp://rave.ohiolink.edu/etdc/view?acc_num=ucin1282328382
Rightsunrestricted, This thesis or dissertation is protected by copyright: some rights reserved. It is licensed for use under a Creative Commons license. Specific terms and permissions are available from this document's record in the OhioLINK ETD Center.

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