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Feasibility of Ellipsometric sensor development for using during PECVD SIOx coated polymer product manufacturing : a thesis /

Thesis (M.S.)--California Polytechnic State University, 2009. / The letter x is subscripted in the title. Title from PDF title page; viewed on October 23, 2009. Major professor: Dr. Richard Savage. "Presented to the faculty of California Polytechnic State University, San Luis Obispo." "In partial fulfillment of the requirements for the degree [of] Master of Science in Materials Engineering." "September 2009." Includes bibliographical references (p. 115-121). Also available on microfiche.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/459796602
Date January 1900
CreatorsHelms, Daniel Lynn. Savage, Richard N.
Publisher[San Luis Obispo, Calif. : California Polytechnic State University],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceClick here to view

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