Plasma properties in high power impulse magnetron sputtering /

Description

Licentiatavhandling (sammanfattning) Linköping : Linköpings universitet, 2008. / Härtill 2 uppsatser.

Links & Downloads

1. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-11621

Tags

Plasmafysik.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/243922305
Date	January 2008
Creators	Lundin, Daniel,
Publisher	Linköping : Department of Physics, Chemistry, and Biology, Linköping University,
Source Sets	OCLC
Language	English
Detected Language	Swedish
Source	Sammanfattning och ramberättelse från Linköping University Electronic Press