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Development of techniques to quantify chemical and mechanical modifications of polymer surfaces application to chemical mechanical polishing /

Thesis (Ph. D.)--Chemical Engineering, Georgia Institute of Technology, 2006. / Samuels, Robert J., Committee Member ; Henderson, Clifford L., Committee Member ; Danyluk, Steven, Committee Member ; Hess, Dennis W., Committee Chair ; Bottomley, Lawrence A., Committee Member ; Morris, Jeffrey F., Committee Co-Chair. Vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/63191480
Date January 2004
CreatorsDiao, Jie.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2004.

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