Vacuum ultraviolet photochemistry and fourier transform infrared spectroscopy of soft x-ray photoresists

Description

Thesis (Ph. D.)--University of Wisconsin--Madison, 1981. / Typescript. Vita. eContent provider-neutral record in process. Description based on print version record. Includes bibliographical references (leaves 206-222).

Links & Downloads

1. http://catalog.hathitrust.org/api/volumes/oclc/7701047.html

Tags

Photoresists. Polymers. Polymerization.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/609202137
Date	January 1981
Creators	Bohn, Paul William.
Source Sets	OCLC
Language	English
Detected Language	English