A Study of the AlN Thin Film by Ion Beam Sputtering

Description

none

Links & Downloads

1. http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0808105-171429

Tags

C-axis preferred orientation

Ion Beam Sputtering

Aluminum Nitride

Additional Fields

Identifer	oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0808105-171429
Date	08 August 2005
Creators	Wu, Meng-feng
Contributors	Der-shin Gan, H. L. Huang, Pouyan Shen
Publisher	NSYSU
Source Sets	NSYSU Electronic Thesis and Dissertation Archive
Language	Cholon
Detected Language	English
Type	text
Format	application/pdf
Source	http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0808105-171429
Rights	campus_withheld, Copyright information available at source archive