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Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications

No description available.
Identiferoai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/5385
Date01 December 2003
CreatorsBarstow, Sean J.
PublisherGeorgia Institute of Technology
Source SetsGeorgia Tech Electronic Thesis and Dissertation Archive
Languageen_US
Detected LanguageEnglish
TypeDissertation
Format9416623 bytes, application/pdf

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