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Remote microwave-enhanced chemical vapor deposition of silicon-nitrogen (SixNy) thin films

Thesis (M.S.)--Ohio University, August, 1991. / Title from PDF t.p.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/230735608
Date January 1991
CreatorsGladysz, Gary M.
PublisherOhio : Ohio University,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceConnect to resource online

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