The development of application software for e-beam writter data preparation. Master thesis. Brno, 2016. The master thesis deals with the e-beam writter data preparation. The first part deals with electron beam lithography, posibilities and problems of data preparation and difractive optical elements. Afterwards the thesis describes development environment which was used for the development of application software itself. In the next part, the thesis deals with the appropriate design of application software, and its user-friendly interface. The output of the thesis is the implementation of the application software.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:251348 |
| Date | January 2016 |
| Creators | Meluzín, Petr |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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