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The Design and Fabrication of Cross-Loop Cavity Filter and Quantum Dot Lasers

The purpose of this thesis is to design and fabricate cross-loop cavity filter. We fabricated optical filter by bended waveguide and 2x2 90-degree MMI crossing model. By this design, we get the power splitter with coupling coefficient is 0, 0.15, 0.5, 0.85. By MatFhcad and BPM simulation, we showed that the device volume was decrease to 34%.
In the quantum dot lasers, we fabricated the Fabry-Perot laser by optical waveguide and cleavage surface. In the material, a 1.3£gm quantum dots InGaAs epitaxial wafer is used to fabricate the lasers. Broad area lasers and ridge waveguide lasers are fabricated and their static properties (IV, LI) are analyzed experimentally.
In fabrication process, first, we defined the device pattern by using photo-lithography technique. Second, we etched ridge waveguide by using dry etching method. Finally, we used the etching solution HBr:HCl:H2O2:H2O=5:4:1:70 to smooth the sidewall and reduce the scattering loss. We showed that the waveguide loss was decrease to 27.9dB/cm.
In the QD lasers characteristic, we can not observe laser characteristics, partly because of the low optical power. Through the optimization of QD growth conditions, we can increase the QD sheet density and increase the number of QD layers. We can also optimize the device processing techniques and laser structure design in order to reduce the series resistance and to increase the optical confinement factor. By using the methods mentioned above, we believe the laser signal can be further increase.
In the cross-loop cavity filter characteristic, we get the FSR=300GHz (simulation value FSR=50GHz) in throughput port and drop port. We attribute this appearance induced by cross couple for 2x2 90-degree MMI. The contracts for the drop port of 10.22dB have been achieved.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0717108-152056
Date17 July 2008
CreatorsChen, Yi-chou
ContributorsKuo-Jui Lin, Shoou-Jinn Chang, Tsong-Sheng Lay, Yi-Jen Chiu, Wood-Hi Cheng
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0717108-152056
Rightsnot_available, Copyright information available at source archive

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