The purpose of this thesis is to design and fabricate optical waveguide reflectors by the etched vertical mirror surfaces. In order to reflect the incident optical mode of multi-mode interference coupler, we fabricate the etched vertical reflective mirror surface with wet etch and dry etch processes. We used the design of etched vertical mirror surfaces to bend the incident optical mode, and changed the length of multi-mode interference coupler for the power splitting ratio and high power output.
In order to reduce bending and transition losses and make the incident optical mode total internal reflection in the etched vertical mirror surfaces, we used ICP-RIE dry etch process to add the depth about 4 µm of the etched vertical mirror surfaces. A 1.52 µm symmetric multiple quantum well InGaAlAs/InGaAs epitaxial wafer is used to fabricate the devices. In the device design, we designed optical waveguide reflectors of one input and two inputs respectively, and utilized them to fabricate Fabry-Perot lasers. We also utilized a reflector of one input and two inputs directly to fabricate a Fabry-Perot laser. In addition, We fabricated a Fabry-Perot laser by two reflectors with 90¢X angle corner, a 1x2 3dB multi-mode interference coupler and a ring resonator.
In fabrication process, firstly, we etched the epitaxial wafer the depth of about 1.79µm by multi-step wet etch to form waveguides. In order to reduce bending loss, we made deep etching for the outside of curve waveguides and optical waveguide reflectors. Then, we etched the reflective mirror to the depth of about 4µm by ICP-RIE dry etch process to have a greater variation of refractive index to reflect the optical mode of reflectors. Finally, we used polyimide to flatten the sides of the ridge waveguides and evaporated metal pad over the ridge waveguides to form the signal pad.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0711106-235831 |
| Date | 11 July 2006 |
| Creators | Chou, Sheng-kuo |
| Contributors | Tao-yuan Chang, Wen-jeng Ho, Tsong-sheng Lay, Tzong-yow Tsai, Wood-hi Cheng |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0711106-235831 |
| Rights | not_available, Copyright information available at source archive |
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