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Effect of dislocation density on residual stress in polycrystalline silicon wafers

Thesis (M. S.)--Mechanical Engineering, Georgia Institute of Technology, 2008. / Committee Chair: Danyluk, Steven; Committee Member: Melkote, Shreyes; Committee Member: Rohatgi, Ajeet.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/269000409
Date January 2008
CreatorsGarcia, Victoria.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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