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Theoretical studies of radio-frequency sheath

Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisors: Bill Drummond and Frank Waelbroeck. Vita. Includes bibliographical references. Also available from UMI.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/68225547
Date January 2004
CreatorsXiang, Nong, Drummond, William E., Waelbroeck, F.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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