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A study of the microstructure and growth of ultra-thin film amorphous hydrogenated carbon (a-C:H) prepared by plasma enhanced chemical vapour deposition (PECVD)

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:264694
Date January 1998
CreatorsLamberton, Robert William
PublisherUniversity of Ulster
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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