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Experimental studies of capacitively coupled RF discharges

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:318752
Date January 1996
CreatorsKu, Victor Po-Tsung
PublisherUniversity of Oxford
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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