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High frequency capacitive single crystal silicon resonators and coupled resonator systems

Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2007. / Committee Chair: Ayazi, Farrokh; Committee Member: Allen, Mark; Committee Member: Brand, Oliver; Committee Member: Degertekin, Levent; Committee Member: Papapolymerou, John. Part of the SMARTech Electronic Thesis and Dissertation Collection.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/430220027
Date January 2006
CreatorsPourkamali, Siavash.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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