Thesis (M. Sc.)--University of Alberta, 2009. / Title from pdf file main screen (viewed on July 13, 2009). "A thesis submitted to the Faculty of Graduate Studies and Research in partial fulfillment of the requirements for the degree of Masters [sic] of Science in Micro-Electro-Mechanical-Systems (MEMS) and Nanosystems, Department of Electrical and Computer Engineernig [sic], University of Alberta." Includes bibliographical references.
| Identifer | oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/424501917 |
| Date | January 2009 |
| Creators | Ko, Wooree. |
| Source Sets | OCLC |
| Language | English |
| Detected Language | English |
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