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Techniques to facilitate the fabrication of ZnO-based thin film bulk acoustic wave devices

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Identiferoai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/14889
Date05 1900
CreatorsPinkett, Shawn L.
PublisherGeorgia Institute of Technology
Source SetsGeorgia Tech Electronic Thesis and Dissertation Archive
Detected LanguageEnglish
TypeDissertation
RightsAccess restricted to authorized Georgia Tech users only.

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