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Micromachined tube-type of Si droplet generator

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Identiferoai:union.ndltd.org:NAGOYA/oai:ir.nul.nagoya-u.ac.jp:2237/13968
Date21 June 2009
CreatorsHida, H., Inagaki, N., Koyama, M., Shikida, M., Sato, K.
PublisherIEEE
Source SetsNagoya University
LanguageEnglish
Detected LanguageEnglish
TypeArticle(publisher)
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