Tungsten trioxide (WO3) films are important for various optical devices and
especially for electrochromic materials. Sputtered WO3 thin films were deposited on
conductive glass substrate (ITO/glass) by RF sputtering from a WO3 target(diameter
2¡¨x 6 mm) in a reactive atmosphere of oxygen and argon flow ratio(0 to 1) mixture in
a total gas pressure of 10m Torr. The RF power was 100W operating at 13.56MHz.We
will improve the WO3 films by post-annealing in different atmosphere ambient.
In addition, to prepare treatment solution of growing WO3 films were dissolved
tungsten to aqueous which mixed hydrofluoric acid and nitric acid until it
supersaturate. This solution was then diluted to 0.02 M of tungsten ions with distilled
water. And we can get the treatment solution (WO3-HF aqueous). The WO3 thin films
have been deposited at 40oC with the treatment solution (WO3-HF aqueous) which
full of W ions, the 0.1M boric acid (H3BO3) solution and added aluminium metal by
liquid phase deposition (LPD) technique. The deposition rate could be controlled to
45 nm/h.
In our experiment, the WO3 films morphology and thickness was characterized
by scanning electron microscopy(SEM), structure was characterized by X-ray
diffraction(XRD), chemical properties was characterized by X-ray photoelectron
spectroscopy(XPS) and Fourier transform infrared spectroscopy(FT-IR), optical
properties was characterized by spectrophotometer(MP-100M), and electrochromic
characterized by cyclic voltammetry(CHI627C).
In our results, it will be improved the optical and electrochromic properties of
sputtered-WO3 films by post-annealing in O2 ambient. we also have try a novel and
very simple process for the thin films of WO3 by the LPD process. Adherent and
conformal WO3 electrochromic films were prepared on ITO/glass from aqueous
fluoride solution.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0805109-221633 |
| Date | 05 August 2009 |
| Creators | Chang, Che-Yang |
| Contributors | Jeng Gong, Tsu-Hsin Chang, Ming-Kwei Lee, Kuo-Mei Chen |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0805109-221633 |
| Rights | withheld, Copyright information available at source archive |
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