Return to search

Experimental investigation of anisotropic etching of silicon in tetra-methyl ammonium hydroxide /

Thesis (M.A. Sc.)--Dept. of Electrical and Computer Engineering, Concordia University, 1995. / "August 1995." Includes bibliographical references (leaves 128-134). Available also on the Internet.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/74393979
Date January 1995
CreatorsNaseh, Sasan.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceConnect to online version

Page generated in 0.0019 seconds