The diploma thesis deals with the experimental study of shielding effect of oxide isolating layer on surface potential measured by Kelvin Probe Force Microscopy. For the study of surface potential were created Au/SiO2 based nanostructures by Electron Beam Lithography, Atomic Layer Deposition and Multilayer Deposition. Surface potential was measured depending on the relative humidity and thickness of oxide isolating layer.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:231956 |
| Date | January 2015 |
| Creators | Švarc, Vojtěch |
| Contributors | Pálesch, Erik, Bartošík, Miroslav |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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