Return to search

Lokální charakterizace elektronických součástek / Local characterization of electronic devices

The development of micro and nanoelectronics and nanophotonics needs novel characterization techniques to ensure higher quality of designed devices. The thesis describes a use of Scanning Near-field Optical Microscopy (SNOM) in dimensional control and in local investigation of diverse physical parameters. As example of its potential, the correlation between object topography and reflection measurement of capacitors is shown.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:218237
Date January 2010
CreatorsMüller, Pavel
ContributorsŠkarvada, Pavel, Tománek, Pavel
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

Page generated in 0.0013 seconds