Development of a magnetic suspension system and its applications in nano-imprinting and nano-metrology

Description

Thesis (Ph. D.)--Ohio State University, 2003. / Title from first page of PDF file. Document formatted into pages; contains x, 175 p.; also includes graphics (some col.) Includes bibliographical references (p. 170-175). Available online via OhioLINK's ETD Center

Links & Downloads

1. http://rave.ohiolink.edu/etdc/view?acc%5Fnum=osu1054236218

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/60553017
Date	January 2003
Creators	Kuo, Shih-Kang,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Connect to this title online