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Scintilační detektor sekundárních elektronů pro VP SEM / Scintillation SE detector for VP SEM

First part of this thesis is a theoretical essay which deals with the basics of the variable pressure scanning electron microscope, includes detection of secondary electrons with a view to a scintillation detector. The first applied part of the thesis is focused on prediction, measuring and setting-up optional working parley in vacuum electrodes scintillation detector system, with a stress small diameter hole in screenings C1 and C2. Second applied part was verify a change of working distance between sample and detector in consequence to optional solution for another work.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:219370
Date January 2011
CreatorsRačanský, David
ContributorsČudek, Pavel, Jirák, Josef
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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