by Chan, Ray. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1994. / Includes bibliographical references (leaves [93-96]). / ACKNOWLEDGMENT / ABSTRACT / FIGURE CAPTIONS / TABLE CAPTIONS / INTRODUCTION / Chapter I. --- PRINCIPLES OF SEM / Chapter 1.1 --- STRUCTURE OF SEM --- p.1-1 / Chapter 1.2 --- IMAGE FORMATION --- p.1-6 / Chapter 1.2.1 --- Electron Beam-Specimen Interaction --- p.1-6 / Chapter 1.2.1.1 --- Electron scattering in solid specimen --- p.1-7 / Chapter 1.2.1.2 --- Electron range and spatial distribution --- p.1-7 / Chapter 1.2.1.3 --- Back scattered electrons(BE) --- p.1-8 / Chapter 1.2.1.4 --- Secondary electron(SE) --- p.1-9 / Chapter 1.2.1.5 --- Other signal types --- p.1-13 / Chapter 1.2.2 --- Types of Image Contrast --- p.1-14 / Chapter 1.3 --- DISTORTION AND NOISE --- p.1-17 / Chapter 1.3.1 --- Lens Aberration --- p.1-17 / Chapter 1.3.1.1 --- Spherical aberration --- p.1-17 / Chapter 1.3.1.2 --- Chromatic aberration --- p.1-18 / Chapter 1.3.1.3 --- Diffraction effect --- p.1-19 / Chapter 1.3.1.4 --- Axial astigmatism --- p.1-20 / Chapter 1.3.1.5 --- Spatial resolution calculation --- p.1-21 / Chapter 1.3.2 --- Image Defects --- p.1-22 / Chapter 1.3.2.1 --- Projection distortion --- p.1-22 / Chapter 1.3.2.2 --- Specimen tilting --- p.1-22 / Chapter 1.3.2.3 --- Moire effects --- p.1-22 / Chapter 1.3.3 --- Noise in SEM --- p.1-23 / Chapter II. --- SEM FOR IC TESTING / Chapter 2.1 --- QUANTITATIVE ANALYSIS OF VOLTAGE MEASUREMENT --- p.2-1 / Chapter 2.1.1 --- Energy Analysis of SEs --- p.2-1 / Chapter 2.1.2 --- Suppression of Local Fields --- p.2-2 / Chapter 2.1.3 --- "Elimination of Topography, Material Contrast and Work Function Variation" --- p.2-2 / Chapter 2.2 --- VOLTAGE RESOLUTION --- p.2-3 / Chapter 2.3 --- TIME RESOLUTION --- p.2-4 / Chapter 2.3.1 --- SE Generation Time --- p.2-4 / Chapter 2.3.2 --- SE Flight Time --- p.2-4 / Chapter 2.3.3 --- Required Voltage Resolution --- p.2-5 / Chapter 2.3.4 --- Electron Beam Pulse Width --- p.2-5 / Chapter 2.4 --- SPATIAL RESOLUTION --- p.2-5 / Chapter 2.5 --- CAPACITIVE COUPLING VOLTAGE CONTRAST --- p.2-6 / Chapter III. --- SEM TESTING TECHNIQUES / Chapter 3.1 --- CONVENTIONAL TESTING METHODS SYNOPSIS --- p.3-1 / Chapter 3.2 --- TESTING TECHNIQUES FOR SEM --- p.3-2 / Chapter 3.2.1 --- Static Mode --- p.3-2 / Chapter 3.2.2 --- Frequency Matching Mode --- p.3-3 / Chapter 3.2.2.1 --- Voltage coding --- p.3-4 / Chapter 3.2.2.2 --- Stroboscopy --- p.3-4 / Chapter 3.2.2.3 --- Waveform measurement --- p.3-6 / Chapter 3.2.2.4 --- Logic state mapping --- p.3-6 / Chapter 3.2.2.5 --- Frequency tracing --- p.3-7 / Chapter 3.2.2.6 --- Frequency mapping --- p.3-8 / Chapter 3.2.2.7 --- Logic state tracing --- p.3-9 / Chapter IV. --- CONVERT AMRAY 1830 INTO E-BEAM TESTER / Chapter 4.1 --- DESIGN CONSIDERATION --- p.4-1 / Chapter 4.1.1 --- Application Consideration --- p.4-1 / Chapter 4.1.2 --- Limitation of the AMRAY 1830 --- p.4-1 / Chapter 4.1.2.1 --- Detection system --- p.4-2 / Chapter 4.1.2.2 --- Scanning driver --- p.4-3 / Chapter 4.1.2.3 --- Beam blanker --- p.4-4 / Chapter 4.1.2.4 --- NibbleNet interface --- p.4-5 / Chapter 4.2 --- HARDWARE ARCHITECTURE --- p.4-6 / Chapter 4.2.1 --- SEM Circuit Varied --- p.4-7 / Chapter 4.2.1.1 --- Adding scanning relays --- p.4-7 / Chapter 4.2.1.2 --- Voltage clippers --- p.4-7 / Chapter 4.2.1.3 --- External scan interface in SEM --- p.4-9 / Chapter 4.2.2 --- PC Interface --- p.4-9 / Chapter 4.2.3 --- Driver Box --- p.4-10 / Chapter 4.2.3.1 --- Data preprocess unit --- p.4-10 / Chapter 4.2.3.2 --- Scanning preprocess unit --- p.4-12 / Chapter 4.2.3.3 --- Control unit --- p.4-12 / Chapter 4.2.4 --- Scanning Generation and Data Acquisition --- p.4-13 / Chapter 4.3 --- SOFTWARE DEVELOPED --- p.4-13 / Chapter 4.3.1 --- Function Library --- p.4-13 / Chapter 4.3.2 --- Integrated Environment --- p.4-14 / Chapter V. --- SYSTEM PERFORMANCE / Chapter 5.1 --- CHARACTERISTICS OF THE SCANNING DRIVERS --- p.5-1 / Chapter 5.1.1 --- Driver Output Changes with Acceleration Voltage --- p.5-2 / Chapter 5.1.2 --- Driver Output Changes with magnification --- p.5-3 / Chapter 5.1.3 --- Frequency Response --- p.5-4 / Chapter 5.1.4 --- Image Distortion --- p.5-7 / Chapter 5.2 --- INTEGRATED STUDY ENVIRONMENT --- p.5-9 / Chapter 5.2.1 --- Setting Status --- p.5-9 / Chapter 5.2.2 --- Image Scanning & Image Saving --- p.5-12 / Chapter 5.2.3 --- Static Probing --- p.5-15 / Chapter 5.2.4 --- Point Probing --- p.5-19 / Chapter 5.2.5 --- Frequency Matching --- p.5-20 / Chapter V. --- SUMMARY --- p.6-1 / REFERENCE / APPENDIX: / Chapter A. --- PROGRAM LISTING / Chapter B. --- CIRCUIT SCHEMATICS
| Identifer | oai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_318182 |
| Date | January 1994 |
| Contributors | Chan, Ray., Chinese University of Hong Kong Graduate School. Division of Electronic Engineering. |
| Publisher | Chinese University of Hong Kong |
| Source Sets | The Chinese University of Hong Kong |
| Language | English |
| Detected Language | English |
| Type | Text, bibliography |
| Format | print, [125] leaves : ill. ; 30 cm. |
| Rights | Use of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/) |
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