Investigation of measurement artifacts introduced by horizontal scanning surface profiling instruments

Description

Thesis (M.S.)--Worcester Polytechnic Institute. / Keywords: Aniosotropy; scanning instruments; scanning; surface metrology; surface; fractal. Includes bibliographical references (p. 52).

Links & Downloads

1. http://www.wpi.edu/Pubs/ETD/Available/etd-0108102-131441

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/48970633
Date	January 2002
Creators	Bergstrom, Torbjorn S.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Link to electronic thesis.