3-D time-depending simulation of void formation in metallization structures

Description

Hannover, University, Diss., 2003.

Links & Downloads

1. http://deposit.ddb.de/cgi-bin/dokserv?idn=969247761
2. http://edok01.tib.uni-hannover.de/edoks/e01dh03/365376841.pdf

Tags

Integrierte Schaltung

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76555182
Date	January 2003
Creators	Dalleau, Dea-Dess David.
Publisher	[S.l. : s.n.],
Source Sets	OCLC
Language	English
Detected Language	English
Source	LF