This graduation thesis deals with the problem of voltage contrast in ESEM. The purpose of this work was to verify influence of used detectors in the dependence on conditions in specimen chamber on the size of voltage contrast. With the conditions in specimen chamber we understand pressure and working conditions of signal detection. We used power transistor as specimen.
Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:217627 |
Date | January 2008 |
Creators | Buchta, Michal |
Contributors | Černoch, Pavel, Jirák, Josef |
Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
Source Sets | Czech ETDs |
Language | Czech |
Detected Language | English |
Type | info:eu-repo/semantics/masterThesis |
Rights | info:eu-repo/semantics/restrictedAccess |
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