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Intelligent control of critical dimensions in the semiconductor industry /

Thesis (M.S.) in Electrical Engineering--University of Maine, 2001. / Includes vita. Includes bibliographical references (leaves 74-77).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/53165774
Date January 2001
CreatorsKhan, Shafaat Ahmed,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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