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A novel in-situ method for inhibiting surface roughening during the thermal oxide desorption etching of silicon and gallium arsenide

Thesis (Ph. D.)--Florida State University, 2005. / Advisor: Dr. Jim P. Zheng, Florida State University, College of Engineering, Dept. of Electrical and Computer Engineering. Title and description from dissertation home page (viewed Sept. 15, 2005). Document formatted into pages; contains xii, 96 pages. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/61515008
Date January 2005
CreatorsPun, Arthur Fong-Yuen. Zheng, Jim P.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
Typeelectronic dissertation

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