by Lo Veng Cheong. / Parallel title in Chinese characters. / Thesis (Ph.D.) -- Chinese University of Hong Kong, 1991. / Bibliography: leaves 116-119. / ACKNOWLEDGEMENT --- p.i / ABSTRACT --- p.ii / LIST OF SYMBOLS --- p.iv / LIST OF FIGURES --- p.ix / LIST OF TABLES --- p.xii / Chapter CHAPTER ONE --- INTRODUCTION --- p.1 / Chapter CHAPTER TWO --- SURVEYS ON THEORETICAL MODELS --- p.7 / Chapter 2.1 --- Some Basic Concepts --- p.7 / Chapter 2.1.1 --- Vacancy Mechanism and Interstitial Mechanism --- p.7 / Chapter 2.1.2 --- Relative Contribution from Various Point Defects Species --- p.15 / Chapter 2.1.3 --- Impurity Point Defect Pairs or 'Centers' --- p.20 / Chapter 2.1.4 --- Anomalous Diffusion --- p.21 / Chapter 2.2 --- Historical Review on Theoretical Models --- p.22 / Chapter 2.3 --- Formulation of the General Model --- p.29 / Chapter 2.3.1 --- Effects to be and Not to be Considered --- p.30 / Chapter 2.3.2 --- Derivation of the Basic Equations --- p.31 / Chapter CHAPTER THREE --- MODELING OF THE DAMAGE ENHANCED DIFFUSION OF IMPLANTED BORONS IN SILICON --- p.35 / Chapter 3.1 --- Brief Description of Powell's Experiment --- p.35 / Chapter 3.2 --- Modeling --- p.38 / Chapter 3.3 --- Results and Discussion --- p.45 / Chapter CHAPTER FOUR --- EXPERIMENTAL INVESTIGATION OF BORON DIFFUSION DIFFUSION ASSISTED BY THE NON-UNIFORMITY OF POINT DEFECTS --- p.66 / Chapter 4.1 --- Introduction --- p.66 / Chapter 4.2 --- Experimental --- p.67 / Chapter 4.3 --- Results and Discussion --- p.88 / Chapter CHAPTER FIVE --- CONCLUSION AND FURTHER SUGGESTIONS --- p.103 / Chapter 5.1 --- Conclusion --- p.103 / Chapter 5.2 --- Further Suggestions --- p.104 / Chapter APPENDIX A --- DOPANT CONCENTRATION DEPENDENCE OF THE ENHANCED DIFFUSION --- p.107 / Chapter APPENDIX B --- FLOW CHART OF NUMERICAL SIMULATION --- p.111 / REFERENCE --- p.116
| Identifer | oai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_318811 |
| Date | January 1991 |
| Contributors | Lo, Veng Cheong., Chinese University of Hong Kong Graduate School. Division of Electronic Engineering. |
| Publisher | Chinese University of Hong Kong |
| Source Sets | The Chinese University of Hong Kong |
| Language | English |
| Detected Language | English |
| Type | Text, bibliography |
| Format | print, xii, 119 leaves : ill. ; 30 cm. |
| Rights | Use of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/) |
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