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In situ transmission infrared spectroscopy of high-k oxide atomic layer deposition onto silicon surfaces

Thesis (Ph. D.)--Rutgers University, 2008. / "Graduate Program in Physics and Astronomy." Includes bibliographical references (p. 161-164).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/430652095
Date January 2008
CreatorsHo, Ming-Tsung.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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