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Resist and residue removal using gas-expanded liquids

Thesis (Ph. D.)--Chemical Engineering, Georgia Institute of Technology, 2004. / Dennis W. Hess, Committee Chair; Charles E. Eckert, Committee Member; Charles L. Liotta, Committee Member; Clifford L. Henderson, Committee Member; J. Carson Meredith, Committee Member. Includes bibliography.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/54364928
Date January 2003
CreatorsSpuller, Matthew Thomas.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2003:

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