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AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS

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Identiferoai:union.ndltd.org:arizona.edu/oai:arizona.openrepository.com:10150/298441
Date January 1978
CreatorsShevlin, Craig Martin, 1943-
PublisherThe University of Arizona.
Source SetsUniversity of Arizona
Languageen_US
Detected LanguageEnglish
Typetext, Dissertation-Reproduction (electronic)
RightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.

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