Closed-vessel microwave assisted volatilization of Ge, Se, Si and quartz as their volatile compounds , for the determination of trace impurities in high purity Ge, Se, Si and quartz is reported. The volatilization of Ge is 98.7% using vapors of aqua regia whereas vapors generated from 72:1 ratio of HCl:HNO3 is required to volatilize 99.2% of Se. Using vapor of 10:5 ratio of HF:HNO3 , the volatilization of Si is 98.6%, and the volatilization of quartz is 99.0% with 15:3 ratio of the mixed acids. The recoveries of Mg, Cr, Mn,, Ni, Co, Cu, Zn, Cd, Ba and Pb are in the range 83-116%. Determinations are carried out using inductively coupled plasma mass spectrometer with Dynamic Reaction CellTM (DRC ICP-MS). Isobaric interferences, due to the formation of 40Ar12C+, 35Cl16OH+, 40Ar16O+ and 40Ar74Ge+ on the determination of 52Cr+, 56Fe+ and 114Cd+, have been alleviated using ammonia cell gas in DRC. Matrix volatilization using in situ generated acid vapors in closed containers resulted in sub ng mL-1 experimental blanks. Method detection limits are in the low ng g-1 level. The methods developed have been applied to determine trace impurities in high purity Ge, Se, Si and quartz samples.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0627104-011017 |
| Date | 27 June 2004 |
| Creators | Ueng, Ruey-Lin |
| Contributors | CHAO-MING CHIANG, TAI-SUNG HSI, SHIUH-JEN JIANG |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0627104-011017 |
| Rights | unrestricted, Copyright information available at source archive |
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