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Chemical relaxation of silane in a radio frequency discharge

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:381498
Date January 1986
CreatorsJohnson, N. P.
PublisherUniversity of Strathclyde
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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