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Metal and dielectric film deposition stress to silicon substrate

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1. https://stars.library.ucf.edu/rtd/733

Identifer	oai:union.ndltd.org:ucf.edu/oai:stars.library.ucf.edu:rtd-1732
Date	01 January 2003
Creators	Alakan, Aziz
Publisher	University of Central Florida
Source Sets	University of Central Florida
Language	English
Detected Language	English
Type	text
Source	Retrospective Theses and Dissertations