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Electron-beam biased reactive evaporation of silicon, silicon oxides, and silicon nitrides /

Thesis (M.S.)--Rochester Institute of Technology, 1991. / Typescript. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/27385531
Date January 1991
CreatorsYeh, Jen-Yu.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceOnline version of thesis

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