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Fabrication of SOI micromechanical devices /

Thesis (doctoral)--Helsinki University of Technology, 2005. / Includes bibliographical references. Also available on the World Wide Web.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/63109925
Date January 1900
CreatorsKiihamäki, Jyrki.
Publisher[Espoo, Finland] : VTT Technical Research Centre of Finland,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceConnect to this title online

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