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Electrical and physical analysis of ultra-thin in-situ steam generated (ISSG) SiO₂ and nitride/oxide stacks for ULSI application /

Thesis (Ph. D.)--University of Texas at Austin, 2000. / Vita. Includes bibliographical references (leaves 120-134). Available also in a digital version from Dissertation Abstracts.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/49940150
Date January 2000
CreatorsLuo, Tien-ying,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceDigital version accessible at:

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